Canada - Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system
For more information and to make a bid you will need to go to the third party website.
Details
Provided by
- Opportunity closing date
- 08 November 2024
- Opportunity publication date
- 07 October 2024
- Value of contract
- to be confirmed
- Your guide to exporting
Description
** Note: The RFP is available for download on Merx.com ***** Note: The RFP must be submitted in Merx.com ***The RFP invites offers for the provision of the following equipment: A Plasma Enhanced Chemical Vapor Deposition (PECVD) system for depositing silicon-based materials. An Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) for metal etching. The proponent must be able to supply both items.THE DELIVERABLES4D LABS at Simon Fraser University is acquiring infrastructure to enable further development of quantum- and microsystems-based technologies. In particular, they are seeking the following:
PECVD (Plasma-Enhanced Chemical Vapor Deposition) system for deposition of silicon-based materials. ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching) system for etching of metals. The tools will be housed in a class 100 Clean Room facility, alongside a variety of micro- and nanofabrication equipment.Key requirements for the systems: Designed for low-to-medium scale research and development. Flexible systems to allow for a wide range of materials to be used. Suitable for a multi-user facility with low service requirements. Simple to operate. Please include the following instrument requirements in the proposal: Floor loading. Electrical power supply (e.g., 208V or 120V). Cooling (including pressure, flow, and heat load). Exhaust. Gases. PECVD/ ICP-RIE Requirements:Mandatory Specifications for PECVD and ICP-RIE There is a basic configuration and performance specification that are mandatory. The proponent is to provide a quote for each item with these specifications in Appendix C – Rate Bid Form.Optional Specifications for PECVD and ICP-RIE: Includes additional features or capabilities that are desirable. Will be considered in the value-added section. Pricing should be provided separately in the Value-Add section of Appendix D. Non-mandatory specifications: This configuration is for additional options and is part of the Value-Add section in Appendix D.
- Opportunity closing date
- 08 November 2024
- Value of contract
- to be confirmed
About the buyer
- Address
- Simon Fraser University
Bid for tender
If your company meets the requirements of the tender, go to the website where the tender is hosted and submit your bid.
This website contains links to other websites that we do not control or maintain. We are not responsible for the content of these sites. We provide these links for your convenience only, and do not necessarily endorse their content.
Before entering into a contract you need to apply for any necessary export licences, which can include applications to trade in certain goods. You should also make your own enquiries and be satisfied by the accuracy of any information supplied to you.